Fabrication of ultra deep electrical isolation trenches with high aspect ratio using drie and dielectric refill 用深反应离子刻蚀和介质填充技术制造具有高深宽比的超深电隔离槽
So the solution is obtained by ansys . at those places with excessive vibration along the lightway , two field measures ( wave impending block and isolation trench ) were adopted to reduce vibration 并在振动较大的地方采用了wib ( waveimpendingblock )和隔振沟两种减振措施,同时对减振效果进行了分析比较,得到了较为理想的结果。